Directed self-assembly of poly(styrene)-block-poly(acrylic acid) copolymers for sub-20nm pitch patterning

Jing Cheng, Richard A. Lawson, Wei Ming Yeh, Nathan D. Jarnagin, Andrew Peters, Laren M. Tolbert, Clifford L. Henderson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Fingerprint

Dive into the research topics of 'Directed self-assembly of poly(styrene)-block-poly(acrylic acid) copolymers for sub-20nm pitch patterning'. Together they form a unique fingerprint.

Engineering & Materials Science

Mathematics

Chemical Compounds

Physics & Astronomy