Direct synthesis of yttrium aluminum garnet particles in an inductively coupled radio-frequency plasma system

Ricky Jain, Steven L. Girshick, Joachim V. Heberlein, Rajesh Mukherjee, Bin Zhang, Toshitaka Nakamura, Amane Mochizuki

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

Advanced phosphor materials such as cerium-doped yttrium aluminum garnet (YAG) are of interest for a variety of applications, including light-emitting diodes. Previous studies have shown that it is difficult to produce the desired YAG phase without ex-situ annealing irrespective of the synthesis technique used. This study focuses on direct synthesis of YAG phosphor particles using an inductively coupled thermal plasma system with a ceramic tube inserted coaxially into the chamber. Numerical modeling indicates that the tube provides a more uniform high-temperature region, without flow recirculation. This is hypothesized to aid in size and phase control through selective particle collection and in-flight annealing. Experiments conducted with the tube-insertion setup indicate that phase and size control of the particles is possible to a certain extent, depending on the size of the tube. Characterization results of the synthesized particles showed that submicron-sized YAG particles are synthesized as the majority phase through the tube-insertion setup.

Original languageEnglish (US)
Pages (from-to)795-811
Number of pages17
JournalPlasma Chemistry and Plasma Processing
Volume30
Issue number6
DOIs
StatePublished - Dec 1 2010

Keywords

  • In-flight annealing
  • Phosphors
  • RF plasma
  • Yttrium aluminum garnet (YAG)

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