Direct nanoimprinting of single crystalline gold: Experiments and dislocation dynamics simulations

J. Zhang; Y. Zhang; N. A. Mara; J. Lou; L. Nicola

doi:10.1016/j.apsusc.2013.11.072

Direct nanoimprinting of single crystalline gold: Experiments and dislocation dynamics simulations

J. Zhang, Y. Zhang, N. A. Mara, J. Lou, L. Nicola

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

This paper addresses the feasibility of direct nanoimprinting and highlights the challenges involved in this technique. Our study focuses on experimental work supported by dislocation dynamics simulations. A gold single crystal is imprinted by a tungsten indenter patterned with parallel lines of various spacings. Dedicated dislocation dynamics simulations give insight in the plastic deformation occurring into the crystal during imprinting. We find that good pattern transfer is achieved when the lines are sufficiently spaced such that dislocation activity can be effective in assisting deformation of the region underneath each line. Yet, the edges of the obtained imprints are not smooth, partly due to dislocation glide.

Original language	English (US)
Pages (from-to)	301-307
Number of pages	7
Journal	Applied Surface Science
Volume	290
DOIs	https://doi.org/10.1016/j.apsusc.2013.11.072
State	Published - Jan 30 2014
Externally published	Yes

Bibliographical note

Funding Information:
L.N. is grateful to the Dutch National Scientific Foundation NWO and Dutch Technology Foundation STW for their financial support (VENI grant 08120). J.L. gratefully acknowledges the financial support by the Air Force Office of Sponsored Research (AFOSR) YIP award FA9550-09-1-0084 and by NSF grant DMR-1128818 . This work was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science. Los Alamos National Laboratory, an affirmative action equal opportunity employer, is operated by Los Alamos National Security, LLC, for the National Nuclear Security Administration of the U.S. Department of Energy under contract DE-AC52-06NA25396.

Keywords

Dislocation dynamics simulations
Experiments
Nanoimprinting

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10.1016/j.apsusc.2013.11.072

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title = "Direct nanoimprinting of single crystalline gold: Experiments and dislocation dynamics simulations",

abstract = "This paper addresses the feasibility of direct nanoimprinting and highlights the challenges involved in this technique. Our study focuses on experimental work supported by dislocation dynamics simulations. A gold single crystal is imprinted by a tungsten indenter patterned with parallel lines of various spacings. Dedicated dislocation dynamics simulations give insight in the plastic deformation occurring into the crystal during imprinting. We find that good pattern transfer is achieved when the lines are sufficiently spaced such that dislocation activity can be effective in assisting deformation of the region underneath each line. Yet, the edges of the obtained imprints are not smooth, partly due to dislocation glide.",

keywords = "Dislocation dynamics simulations, Experiments, Nanoimprinting",

author = "J. Zhang and Y. Zhang and Mara, {N. A.} and J. Lou and L. Nicola",

note = "Funding Information: L.N. is grateful to the Dutch National Scientific Foundation NWO and Dutch Technology Foundation STW for their financial support (VENI grant 08120). J.L. gratefully acknowledges the financial support by the Air Force Office of Sponsored Research (AFOSR) YIP award FA9550-09-1-0084 and by NSF grant DMR-1128818 . This work was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science. Los Alamos National Laboratory, an affirmative action equal opportunity employer, is operated by Los Alamos National Security, LLC, for the National Nuclear Security Administration of the U.S. Department of Energy under contract DE-AC52-06NA25396.",

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doi = "10.1016/j.apsusc.2013.11.072",

language = "English (US)",

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T2 - Experiments and dislocation dynamics simulations

AU - Zhang, J.

AU - Zhang, Y.

AU - Mara, N. A.

AU - Lou, J.

AU - Nicola, L.

N1 - Funding Information: L.N. is grateful to the Dutch National Scientific Foundation NWO and Dutch Technology Foundation STW for their financial support (VENI grant 08120). J.L. gratefully acknowledges the financial support by the Air Force Office of Sponsored Research (AFOSR) YIP award FA9550-09-1-0084 and by NSF grant DMR-1128818 . This work was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science. Los Alamos National Laboratory, an affirmative action equal opportunity employer, is operated by Los Alamos National Security, LLC, for the National Nuclear Security Administration of the U.S. Department of Energy under contract DE-AC52-06NA25396.

PY - 2014/1/30

Y1 - 2014/1/30

N2 - This paper addresses the feasibility of direct nanoimprinting and highlights the challenges involved in this technique. Our study focuses on experimental work supported by dislocation dynamics simulations. A gold single crystal is imprinted by a tungsten indenter patterned with parallel lines of various spacings. Dedicated dislocation dynamics simulations give insight in the plastic deformation occurring into the crystal during imprinting. We find that good pattern transfer is achieved when the lines are sufficiently spaced such that dislocation activity can be effective in assisting deformation of the region underneath each line. Yet, the edges of the obtained imprints are not smooth, partly due to dislocation glide.

AB - This paper addresses the feasibility of direct nanoimprinting and highlights the challenges involved in this technique. Our study focuses on experimental work supported by dislocation dynamics simulations. A gold single crystal is imprinted by a tungsten indenter patterned with parallel lines of various spacings. Dedicated dislocation dynamics simulations give insight in the plastic deformation occurring into the crystal during imprinting. We find that good pattern transfer is achieved when the lines are sufficiently spaced such that dislocation activity can be effective in assisting deformation of the region underneath each line. Yet, the edges of the obtained imprints are not smooth, partly due to dislocation glide.

KW - Dislocation dynamics simulations

KW - Experiments

KW - Nanoimprinting

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JF - Applied Surface Science

ER -

Direct nanoimprinting of single crystalline gold: Experiments and dislocation dynamics simulations

Abstract

Bibliographical note

Keywords

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