Developments of SOI monolithic pixel detectors

Y. Arai, T. Miyoshi, Y. Unno, T. Tsuboyama, S. Terada, Y. Ikegami, T. Kohriki, K. Tauchi, Y. Ikemoto, R. Ichimiya, H. Ikeda, K. Hara, H. Miyake, M. Kochiyama, T. Sega, K. Hanagaki, M. Hirose, T. Hatsui, T. Kudo, T. HironoM. Yabashi, Y. Furukawa, G. Varner, M. Cooney, H. Hoedlmoser, J. Kennedy, H. Sahoo, M. Battaglia, P. Denes, C. Vu, D. Contarato, P. Giubilato, L. Glesener, R. Yarema, R. Lipton, G. Deptuch, M. Trimpl, M. Ohno, K. Fukuda, H. Komatsubara, J. Ida, M. Okihara, H. Hayashi, Y. Kawai, A. Ohtomo

Research output: Contribution to journalArticlepeer-review

41 Scopus citations

Abstract

A monolithic pixel detector with 0.2μm silicon-on-insulator (SOI) CMOS technology has been developed. It has both a thick high-resistivity sensor layer and thin LSI circuit layer on a single chip. Integration-type and counting-type pixel detectors are fabricated and tested with light and X-rays. The process is open to many researchers through Multi Project Wafer (MPW) runs operated by KEK. Further improvements of the fabrication technologies are also under investigation by using a buried p-well and 3D integration technologies.

Original languageEnglish (US)
Pages (from-to)186-188
Number of pages3
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume623
Issue number1
DOIs
StatePublished - Nov 1 2010

Bibliographical note

Funding Information:
The authors wish to thank F. Takasaki and J. Haba for their continuing support to this project. This work is supported by VLSI Design and Education Center (VDEC), The University of Tokyo with the collaboration of the Cadence Corporation and Mentor Graphics Corporation.

Keywords

  • Particle tracking
  • Pixel
  • SOI
  • X-ray imaging

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