@inproceedings{52b6df5f38444cfaa5297fc904598baf,
title = "Development of miniature microwave circuit components using micromachining techniques",
abstract = "Miniature microwave circuit components are presented that were developed using silicon micromachining techniques. Although micromachining is very well known in sensor applications, it is used, herein, for the first time in microwave applications. This paper presents the development of micromachined lines and describes the theoretical and experimental characterization of circuit components such as filters and tuning stubs.",
author = "Drayton, {Rhonda F.} and Katehi, {Linda P B}",
year = "1994",
month = jan,
day = "1",
language = "English (US)",
isbn = "0780317793",
series = "IEEE MTT-S International Microwave Symposium Digest",
publisher = "Publ by IEEE",
pages = "225--228",
booktitle = "IEEE MTT-S International Microwave Symposium Digest",
note = "Proceedings of the IEEE MTT-S International Microwave Symposium ; Conference date: 23-05-1994 Through 27-05-1994",
}