Development of characterization methods for micromachined embedded test structures

E. Davies-Venn; T. Pan; A. Baldi; R. F. Drayton; B. Ziaie

Development of characterization methods for micromachined embedded test structures

E. Davies-Venn, T. Pan, A. Baldi, R. F. Drayton, B. Ziaie

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Methods of characterizing low frequency embedded passives on silicon substrates are suggested. Durioid fixtures and on-wafer methods are discussed for extracting Q factor of embedded coils on high and low resistivity silicon. Feedline designs are discuss and data is presented regarding the performance limitation of CPW based design architectures. A quality (Q) factor of an embedded inductor > 50 is successfully extracted for operation below 1 GHz based on a 15 turn configuration using S-parameter measurements. Finally inductor performance in terms of Q factor is presented based on on-wafer measurements.

Original language	English (US)
Title of host publication	2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems
Subtitle of host publication	Digest of Papers
Editors	J.D. Cressler, J. Papapolymerou
Pages	318-321
Number of pages	4
State	Published - 2004
Event	2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers - Atlanta, GA, United States Duration: Sep 8 2004 → Sep 10 2004

Publication series

Name	2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers

Other

Other	2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers
Country/Territory	United States
City	Atlanta, GA
Period	9/8/04 → 9/10/04

Keywords

Characterization and testing
Q factor
Silicon embedded

Find It

Find It at U of M Libraries

Cite this

Davies-Venn, E., Pan, T., Baldi, A., Drayton, R. F., & Ziaie, B. (2004). Development of characterization methods for micromachined embedded test structures. In J. D. Cressler, & J. Papapolymerou (Eds.), 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers (pp. 318-321). (2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers).

Development of characterization methods for micromachined embedded test structures. / Davies-Venn, E.; Pan, T.; Baldi, A. et al.
2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers. ed. / J.D. Cressler; J. Papapolymerou. 2004. p. 318-321 (2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Davies-Venn, E, Pan, T, Baldi, A, Drayton, RF & Ziaie, B 2004, Development of characterization methods for micromachined embedded test structures. in JD Cressler & J Papapolymerou (eds), 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers. 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers, pp. 318-321, 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers, Atlanta, GA, United States, 9/8/04.

Davies-Venn E, Pan T, Baldi A, Drayton RF, Ziaie B. Development of characterization methods for micromachined embedded test structures. In Cressler JD, Papapolymerou J, editors, 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers. 2004. p. 318-321. (2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers).

Davies-Venn, E. ; Pan, T. ; Baldi, A. et al. / Development of characterization methods for micromachined embedded test structures. 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers. editor / J.D. Cressler ; J. Papapolymerou. 2004. pp. 318-321 (2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers).

@inproceedings{7fda685b98b5433ca32f9fd723367489,

title = "Development of characterization methods for micromachined embedded test structures",

abstract = "Methods of characterizing low frequency embedded passives on silicon substrates are suggested. Durioid fixtures and on-wafer methods are discussed for extracting Q factor of embedded coils on high and low resistivity silicon. Feedline designs are discuss and data is presented regarding the performance limitation of CPW based design architectures. A quality (Q) factor of an embedded inductor > 50 is successfully extracted for operation below 1 GHz based on a 15 turn configuration using S-parameter measurements. Finally inductor performance in terms of Q factor is presented based on on-wafer measurements.",

keywords = "Characterization and testing, Q factor, Silicon embedded",

author = "E. Davies-Venn and T. Pan and A. Baldi and Drayton, {R. F.} and B. Ziaie",

year = "2004",

language = "English (US)",

isbn = "0780387031",

series = "2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers",

pages = "318--321",

editor = "J.D. Cressler and J. Papapolymerou",

booktitle = "2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems",

note = "2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers ; Conference date: 08-09-2004 Through 10-09-2004",

}

TY - GEN

T1 - Development of characterization methods for micromachined embedded test structures

AU - Davies-Venn, E.

AU - Pan, T.

AU - Baldi, A.

AU - Drayton, R. F.

AU - Ziaie, B.

PY - 2004

Y1 - 2004

N2 - Methods of characterizing low frequency embedded passives on silicon substrates are suggested. Durioid fixtures and on-wafer methods are discussed for extracting Q factor of embedded coils on high and low resistivity silicon. Feedline designs are discuss and data is presented regarding the performance limitation of CPW based design architectures. A quality (Q) factor of an embedded inductor > 50 is successfully extracted for operation below 1 GHz based on a 15 turn configuration using S-parameter measurements. Finally inductor performance in terms of Q factor is presented based on on-wafer measurements.

AB - Methods of characterizing low frequency embedded passives on silicon substrates are suggested. Durioid fixtures and on-wafer methods are discussed for extracting Q factor of embedded coils on high and low resistivity silicon. Feedline designs are discuss and data is presented regarding the performance limitation of CPW based design architectures. A quality (Q) factor of an embedded inductor > 50 is successfully extracted for operation below 1 GHz based on a 15 turn configuration using S-parameter measurements. Finally inductor performance in terms of Q factor is presented based on on-wafer measurements.

KW - Characterization and testing

KW - Q factor

KW - Silicon embedded

UR - http://www.scopus.com/inward/record.url?scp=20344380494&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=20344380494&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:20344380494

SN - 0780387031

T3 - 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers

SP - 318

EP - 321

BT - 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems

A2 - Cressler, J.D.

A2 - Papapolymerou, J.

T2 - 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers

Y2 - 8 September 2004 through 10 September 2004

ER -

Development of characterization methods for micromachined embedded test structures

Abstract

Publication series

Other

Keywords

Find It

Other files and links

Fingerprint

Cite this