Development of characterization methods for micromachined embedded test structures

E. Davies-Venn, T. Pan, A. Baldi, R. F. Drayton, B. Ziaie

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Methods of characterizing low frequency embedded passives on silicon substrates are suggested. Durioid fixtures and on-wafer methods are discussed for extracting Q factor of embedded coils on high and low resistivity silicon. Feedline designs are discuss and data is presented regarding the performance limitation of CPW based design architectures. A quality (Q) factor of an embedded inductor > 50 is successfully extracted for operation below 1 GHz based on a 15 turn configuration using S-parameter measurements. Finally inductor performance in terms of Q factor is presented based on on-wafer measurements.

Original languageEnglish (US)
Title of host publication2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems
Subtitle of host publicationDigest of Papers
EditorsJ.D. Cressler, J. Papapolymerou
Pages318-321
Number of pages4
StatePublished - Dec 1 2004
Event2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers - Atlanta, GA, United States
Duration: Sep 8 2004Sep 10 2004

Publication series

Name2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers

Other

Other2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers
CountryUnited States
CityAtlanta, GA
Period9/8/049/10/04

Keywords

  • Characterization and testing
  • Q factor
  • Silicon embedded

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