Development of advanced test methods for cleanroom garments

Benjamin Y.H. Liu, David Y Pui, Yan Ye, Ed Gallo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

The performance of a cleanroom garment in the operating environment of a semiconductor fabrication facility is determined by the properties of the garment fabric and the garment design. Ideally, the garment fabric should be highly permeable to water vapor and essentially impermeable to particles. The design of the garment should minimize the discharge of particles generated by the wearer into the cleanroom air. This paper describes a three-part test method for cleanroom garments to determine water vapor transmission through the garment fabric, particle penetration through the garment fabric under specified conditions of pressure drop and velocity, and the reduction in particle generation and discharge into the cleanroom by the garment. The performance of some typical cleanroom garments as measured by this test method is described and compared.

Original languageEnglish (US)
Title of host publicationProceedings, Annual Technical Meeting - Institute of Environmental Sciences
Editors Anon
PublisherPubl by Inst of Environmental Sciences
Pages68-78
Number of pages11
ISBN (Print)1877862193
StatePublished - Dec 1 1993
EventProceedings of the 39th Annual Technical Meeting of Institute of Environmental Sciences - Las Vegas, NV, USA
Duration: May 2 1993May 7 1993

Publication series

NameProceedings, Annual Technical Meeting - Institute of Environmental Sciences
Volume1
ISSN (Print)0073-9227

Other

OtherProceedings of the 39th Annual Technical Meeting of Institute of Environmental Sciences
CityLas Vegas, NV, USA
Period5/2/935/7/93

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