Development of 5.5-GHz band pass filter in all silicon multilayer substrate with air dielectric

Keyphrases

• Bandpass Filter 100%
• All-silicon 100%
• GHz Band 100%
• Multilayer Substrate 100%
• Air Dielectric 100%
• Inductors 40%
• Two-layer 40%
• Inductance 40%
• Through Silicon via 40%
• Technology Integration 20%
• Filter Design 20%
• Capacitively Coupled 20%
• Design Aspects 20%
• Fifth-order 20%
• Filter Implementation 20%
• 3-dB Bandwidth 20%
• WiMAX Application 20%
• Spiral Inductor 20%
• Chebyshev Bandpass Filter 20%
• Self-resonant Frequency 20%

Engineering

• Dielectrics 100%
• Bandpass Filter 100%
• Filter Design 16%
• Q Factor 16%
• Db Bandwidth 16%
• Three Dimensional Integrated Circuits 16%
• Design Aspect 16%
• Technology Integration 16%
• Resonant Frequency 16%