Determination of electron energy distribution functions in surface wave produced plasmas. II. Measurements

U. Kortshagen; H. Schlueter

doi:10.1088/0022-3727/24/9/010

Determination of electron energy distribution functions in surface wave produced plasmas. II. Measurements

U. Kortshagen, H. Schlueter

Mechanical Engineering

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9 Scopus citations

Abstract

Electron energy distribution functions of surface wave produced argon plasmas are measured via second derivatives of Langmuir probe characteristics. An active compensation method for avoiding modifications by the RF electric field is employed. Good agreement with previous numerical solutions of the Boltzmann equation is observed.

Original language	English (US)
Pages (from-to)	1585-1593
Number of pages	9
Journal	Journal of Physics D: Applied Physics
Volume	24
Issue number	9
DOIs	https://doi.org/10.1088/0022-3727/24/9/010
State	Published - Jan 1 1991

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@article{2b46f30da9374c2a967b59365ed35ae6,

title = "Determination of electron energy distribution functions in surface wave produced plasmas. II. Measurements",

abstract = "Electron energy distribution functions of surface wave produced argon plasmas are measured via second derivatives of Langmuir probe characteristics. An active compensation method for avoiding modifications by the RF electric field is employed. Good agreement with previous numerical solutions of the Boltzmann equation is observed.",

author = "U. Kortshagen and H. Schlueter",

year = "1991",

month = jan,

day = "1",

doi = "10.1088/0022-3727/24/9/010",

language = "English (US)",

volume = "24",

pages = "1585--1593",

journal = "Journal Physics D: Applied Physics",

issn = "0022-3727",

publisher = "IOP Publishing Ltd.",

number = "9",

}

TY - JOUR

T1 - Determination of electron energy distribution functions in surface wave produced plasmas. II. Measurements

AU - Kortshagen, U.

AU - Schlueter, H.

PY - 1991/1/1

Y1 - 1991/1/1

N2 - Electron energy distribution functions of surface wave produced argon plasmas are measured via second derivatives of Langmuir probe characteristics. An active compensation method for avoiding modifications by the RF electric field is employed. Good agreement with previous numerical solutions of the Boltzmann equation is observed.

AB - Electron energy distribution functions of surface wave produced argon plasmas are measured via second derivatives of Langmuir probe characteristics. An active compensation method for avoiding modifications by the RF electric field is employed. Good agreement with previous numerical solutions of the Boltzmann equation is observed.

UR - http://www.scopus.com/inward/record.url?scp=0026221779&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0026221779&partnerID=8YFLogxK

U2 - 10.1088/0022-3727/24/9/010

DO - 10.1088/0022-3727/24/9/010

M3 - Article

AN - SCOPUS:0026221779

SN - 0022-3727

VL - 24

SP - 1585

EP - 1593

JO - Journal Physics D: Applied Physics

JF - Journal Physics D: Applied Physics

IS - 9

ER -

Determination of electron energy distribution functions in surface wave produced plasmas. II. Measurements

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