Detection of aluminum particles during the chemical vapor deposition of aluminum films using tertiaryamine complexes of alane (AIH3)

Michael G. Simmonds, Wayne L. Gladfelter, Nagaraja Rao, Wladyslaw W. Szymanski, Kang Ho Ahn, Peter H. McMurry

Research output: Contribution to journal › Letter › peer-review

40 Scopus citations

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Keyphrases

Material Science

Chemical Engineering