Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes

Application of protracted colored noise dynamics

Andrew J Peters, Richard A. Lawson, Peter J. Ludovice, Clifford L. Henderson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Directed self-assembly (DSA) of block copolymers is a promising technique for producing sub-30 nm pitch regular patterns, and the development of these DSA techniques could benefit greatly from computer simulation of such methods. Current simulation methods such as mean field approaches suffer from a number of limitations that affect their accuracy and their level of detail. In this work a simulation approach based on the use of Protracted Colored Noise Dynamics (PCND) with coarse grained mesoscale polymer models based on statistical segment beads has been developed and studied. It has been shown that using PCND allows simulations to reach an equilibrium state at least 35 times faster than without PCND.

Original languageEnglish (US)
Title of host publicationAlternative Lithographic Technologies IV
PublisherSPIE
ISBN (Print)9780819489791
DOIs
StatePublished - Jan 1 2012
EventAlternative Lithographic Technologies IV - San Jose, CA, United States
Duration: Feb 13 2012Feb 16 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8323
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceAlternative Lithographic Technologies IV
CountryUnited States
CitySan Jose, CA
Period2/13/122/16/12

Fingerprint

Block Copolymers
Colored Noise
Self-assembly
block copolymers
Dynamic Simulation
Self assembly
Block copolymers
self assembly
Computer simulation
Polymers
simulation
Equilibrium State
beads
Simulation Methods
Mean Field
Computer Simulation
computerized simulation
Model-based
polymers
Simulation

Keywords

  • PMMA
  • block-copolymer
  • modeling
  • molecular dynamics
  • polystyrene
  • protracted colored noise dynamics
  • self-assembly
  • simulation

Cite this

Peters, A. J., Lawson, R. A., Ludovice, P. J., & Henderson, C. L. (2012). Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes: Application of protracted colored noise dynamics. In Alternative Lithographic Technologies IV [83231T] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8323). SPIE. https://doi.org/10.1117/12.918077

Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes : Application of protracted colored noise dynamics. / Peters, Andrew J; Lawson, Richard A.; Ludovice, Peter J.; Henderson, Clifford L.

Alternative Lithographic Technologies IV. SPIE, 2012. 83231T (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8323).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Peters, AJ, Lawson, RA, Ludovice, PJ & Henderson, CL 2012, Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes: Application of protracted colored noise dynamics. in Alternative Lithographic Technologies IV., 83231T, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8323, SPIE, Alternative Lithographic Technologies IV, San Jose, CA, United States, 2/13/12. https://doi.org/10.1117/12.918077
Peters AJ, Lawson RA, Ludovice PJ, Henderson CL. Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes: Application of protracted colored noise dynamics. In Alternative Lithographic Technologies IV. SPIE. 2012. 83231T. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.918077
Peters, Andrew J ; Lawson, Richard A. ; Ludovice, Peter J. ; Henderson, Clifford L. / Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes : Application of protracted colored noise dynamics. Alternative Lithographic Technologies IV. SPIE, 2012. (Proceedings of SPIE - The International Society for Optical Engineering).
@inproceedings{4366666e66f4447ca691e0c0a366821e,
title = "Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes: Application of protracted colored noise dynamics",
abstract = "Directed self-assembly (DSA) of block copolymers is a promising technique for producing sub-30 nm pitch regular patterns, and the development of these DSA techniques could benefit greatly from computer simulation of such methods. Current simulation methods such as mean field approaches suffer from a number of limitations that affect their accuracy and their level of detail. In this work a simulation approach based on the use of Protracted Colored Noise Dynamics (PCND) with coarse grained mesoscale polymer models based on statistical segment beads has been developed and studied. It has been shown that using PCND allows simulations to reach an equilibrium state at least 35 times faster than without PCND.",
keywords = "PMMA, block-copolymer, modeling, molecular dynamics, polystyrene, protracted colored noise dynamics, self-assembly, simulation",
author = "Peters, {Andrew J} and Lawson, {Richard A.} and Ludovice, {Peter J.} and Henderson, {Clifford L.}",
year = "2012",
month = "1",
day = "1",
doi = "10.1117/12.918077",
language = "English (US)",
isbn = "9780819489791",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
booktitle = "Alternative Lithographic Technologies IV",
address = "United States",

}

TY - GEN

T1 - Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes

T2 - Application of protracted colored noise dynamics

AU - Peters, Andrew J

AU - Lawson, Richard A.

AU - Ludovice, Peter J.

AU - Henderson, Clifford L.

PY - 2012/1/1

Y1 - 2012/1/1

N2 - Directed self-assembly (DSA) of block copolymers is a promising technique for producing sub-30 nm pitch regular patterns, and the development of these DSA techniques could benefit greatly from computer simulation of such methods. Current simulation methods such as mean field approaches suffer from a number of limitations that affect their accuracy and their level of detail. In this work a simulation approach based on the use of Protracted Colored Noise Dynamics (PCND) with coarse grained mesoscale polymer models based on statistical segment beads has been developed and studied. It has been shown that using PCND allows simulations to reach an equilibrium state at least 35 times faster than without PCND.

AB - Directed self-assembly (DSA) of block copolymers is a promising technique for producing sub-30 nm pitch regular patterns, and the development of these DSA techniques could benefit greatly from computer simulation of such methods. Current simulation methods such as mean field approaches suffer from a number of limitations that affect their accuracy and their level of detail. In this work a simulation approach based on the use of Protracted Colored Noise Dynamics (PCND) with coarse grained mesoscale polymer models based on statistical segment beads has been developed and studied. It has been shown that using PCND allows simulations to reach an equilibrium state at least 35 times faster than without PCND.

KW - PMMA

KW - block-copolymer

KW - modeling

KW - molecular dynamics

KW - polystyrene

KW - protracted colored noise dynamics

KW - self-assembly

KW - simulation

UR - http://www.scopus.com/inward/record.url?scp=84878420262&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84878420262&partnerID=8YFLogxK

U2 - 10.1117/12.918077

DO - 10.1117/12.918077

M3 - Conference contribution

SN - 9780819489791

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Alternative Lithographic Technologies IV

PB - SPIE

ER -