Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes: Application of protracted colored noise dynamics

Andrew J. Peters, Richard A. Lawson, Peter J. Ludovice, Clifford L. Henderson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

Directed self-assembly (DSA) of block copolymers is a promising technique for producing sub-30 nm pitch regular patterns, and the development of these DSA techniques could benefit greatly from computer simulation of such methods. Current simulation methods such as mean field approaches suffer from a number of limitations that affect their accuracy and their level of detail. In this work a simulation approach based on the use of Protracted Colored Noise Dynamics (PCND) with coarse grained mesoscale polymer models based on statistical segment beads has been developed and studied. It has been shown that using PCND allows simulations to reach an equilibrium state at least 35 times faster than without PCND.

Original languageEnglish (US)
Title of host publicationAlternative Lithographic Technologies IV
PublisherSPIE
ISBN (Print)9780819489791
DOIs
StatePublished - Jan 1 2012
EventAlternative Lithographic Technologies IV - San Jose, CA, United States
Duration: Feb 13 2012Feb 16 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8323
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceAlternative Lithographic Technologies IV
CountryUnited States
CitySan Jose, CA
Period2/13/122/16/12

Keywords

  • PMMA
  • block-copolymer
  • modeling
  • molecular dynamics
  • polystyrene
  • protracted colored noise dynamics
  • self-assembly
  • simulation

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    Peters, A. J., Lawson, R. A., Ludovice, P. J., & Henderson, C. L. (2012). Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes: Application of protracted colored noise dynamics. In Alternative Lithographic Technologies IV [83231T] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8323). SPIE. https://doi.org/10.1117/12.918077