Design, simulation, fabrication, and characterization of a PMMA tunneling sensor based on hot embossing technique

J. Wang, T. Cui

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

Polymethyl methacrylate (PMMA) was chosen to fabricate highly sensitive tunneling sensors due to its extremely low cost and quick machining by hot embossing. The structure of an all-PMMA-based membrane vertical tunneling sensor platform was synthesized by ANSYS. The system characteristics and feedback system were evaluated with MatLab SimuLink. The first all-PMMA-based membrane tunneling transducers were produced by hot embossing replication with silicon masters. The fabricated tunneling sensors have presented a tunneling barrier height of 0.17 eV, a sensitivity of 26 V/g, and a dynamic range of 1.5 mg, which demonstrated competitive performances with lower cost, lighter weight, and easier fabrication processing.

Original languageEnglish (US)
Pages (from-to)452-455
Number of pages4
JournalMicrosystem Technologies
Volume11
Issue number6
DOIs
StatePublished - Jun 1 2005

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