Design, simulation and fabrication of a bridge structure microtransducer

Keyphrases

• Analytical Results 20%
• ANSYS Simulation 20%
• Bridge Structure 100%
• Bridge Transducer 20%
• Bulk Micromachining 20%
• Cantilevered Beam 20%
• Deep Trench 20%
• Design Simulation 100%
• Fabrication Methods 20%
• Frequency Response 20%
• Micromachining Technique 20%
• Microtransducer 100%
• Process Combination 20%
• PZT Thin Films 40%
• Reactive Ion Etching 80%
• Sandwich Structure 20%
• Silicon Wafer 40%
• Wafer 20%

Material Science

• Micromachining 25%
• Reactive Ion Etching 100%
• Silicon Wafer 50%
• Thin Films 50%

Engineering

• Sandwich Structures 25%