Design, simulation and fabrication of a bridge structure microtransducer

Keyphrases

• Design Simulation 100%
• Bridge Structure 100%
• Microtransducer 100%
• Reactive Ion Etching 80%
• Silicon Wafer 40%
• PZT Thin Films 40%
• Frequency Response 20%
• Fabrication Methods 20%
• Analytical Results 20%
• Wafer 20%
• Deep Trench 20%
• Cantilevered Beam 20%
• Micromachining Technique 20%
• Sandwich Structure 20%
• Process Combination 20%
• Bridge Transducer 20%
• ANSYS Simulation 20%
• Bulk Micromachining 20%

Engineering

• Bridge Structure 100%
• Thin Films 50%
• Transducer 50%
• Silicon Wafer 50%
• Optimal Design 25%
• Experimental Result 25%
• Cantilever Beam 25%
• Q Factor 25%
• Analytical Result 25%
• Micro Machining 25%
• Beam Structure 25%
• Sandwich Structures 25%
• Frequency Response 25%

Material Science

• Reactive Ion Etching 100%
• Silicon Wafer 50%
• Thin Films 50%
• Micromachining 25%