Design of High-frequency, Paralleled Resonant Inverter to Control Output Power for Plasma Generation

Keyphrases

• Inverter 100%
• Power Output 100%
• Plasma Generation 100%
• Resonant Inverter 100%
• Step Change 60%
• Designing Method 40%
• High Frequency Power 20%
• Additional Power 20%
• Operation Mode 20%
• Parallel Connection 20%
• Second Harmonic 20%
• Additional Losses 20%
• Operation Range 20%
• Timing Control 20%
• Semiconductor Processing 20%
• Zero Voltage Switching 20%
• Pulsed Plasma 20%
• Load Variation 20%
• DC-AC Inverter 20%
• Reactive Elements 20%
• Inverter System 20%
• Parallel Resonance 20%
• Power Inverter 20%
• Actual Load 20%
• FPGA Board 20%
• Output-series 20%
• Discrete Power Control 20%
• High Efficiency 20%
• Power Combining Network 20%

Engineering

• Output Power 100%
• Step Change 60%
• Field Programmable Gate Arrays 20%
• Parallel Connection 20%
• Harmonics 20%
• Power Control 20%
• Range Operation 20%
• Zero Voltage Switching 20%
• Microsecond 20%
• Additional Loss 20%
• Load Variation 20%
• Operation Mode 20%
• Power Inverter 20%
• Reactive Element 20%
• Parallel Resonance 20%
• Actual Load 20%