Design of a custom vapor transport co-deposition system for scalable production of perovskite solar cells

Ella Wassweiler, Anurag Panda, Tamar Kadosh, Thienan Nguyen, Wan-Ju Hsu, Emma Pettit, Russell J. Holmes, Harry Tuller, Vladimir Bulovic

Research output: Contribution to journalArticlepeer-review


Vacuum-deposited perovskites provide a more direct path to manufacturing large area solar cells because of ready compatibility with multilayered architectures and historic use in the electronics industry. However, vacuum compatible co-deposition of organic-inorganic perovskites remains difficult due to issues of precisely controlling the organic precursor flux. Here, we demonstrate a manufacturing prototype specifically designed for co-depositing organic-inorganic perovskites and evaluate it with respect to the influence of process parameters on film growth. Through depositing and characterizing methylammonium lead iodide (MAPbI3) perovskite films, we highlight the necessary design requirements while measuring the influence of film growth parameters on deposition rate and perovskite phases.

Original languageEnglish (US)
Article number052801
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number5
StatePublished - Sep 1 2023

Bibliographical note

Funding Information:
This material was based upon work supported by the U.S. Department of Energy's Office of Energy Efficiency and Renewable Energy (EERE) under the Solar Energy Technologies Office Award No. DE-EE0009514. The views expressed herein do not necessarily represent the views of the U.S. Department of Energy or the United States Government. Funding was also received from the MIT-TATA GridEdge program.

Publisher Copyright:
© 2023 Author(s).


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