Design and implementation of a rotationally symmetric microellipsometer

Qiwen Zhan; James R Leger

doi:10.1117/12.451710

Design and implementation of a rotationally symmetric microellipsometer

Qiwen Zhan, James R Leger

Electrical and Computer Engineering

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

We report a unique scanning microellipsometer using a high numerical aperture lens to provide large-angle ellipsometric illumination and high spatial resolution. This microellipsometer is equivalent to a multi-channel rotating analyzer ellipsometer obeying rotational symmetry. The symmetry is realized by using a circularly polarized incident beam, a variable circular retarder and a rotational analyzer. This rotational symmetry offers better signal-to-noise ratio compared with the other microellipsometer techniques. Scanning ellipsometric measurement of surface relief with spatial resolution of 0.5 μm is performed with a NA of 0.8 illumination by use of a He-Ne laser source.

Original language	English (US)
Pages (from-to)	83-89
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4779
DOIs	https://doi.org/10.1117/12.451710
State	Published - 2002
Event	Advanced Characterization Techniques for Optical, Semiconductor, and data Storage Components - Seattle, WA, United States Duration: Jul 9 2002 → Jul 11 2002

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title = "Design and implementation of a rotationally symmetric microellipsometer",

abstract = "We report a unique scanning microellipsometer using a high numerical aperture lens to provide large-angle ellipsometric illumination and high spatial resolution. This microellipsometer is equivalent to a multi-channel rotating analyzer ellipsometer obeying rotational symmetry. The symmetry is realized by using a circularly polarized incident beam, a variable circular retarder and a rotational analyzer. This rotational symmetry offers better signal-to-noise ratio compared with the other microellipsometer techniques. Scanning ellipsometric measurement of surface relief with spatial resolution of 0.5 μm is performed with a NA of 0.8 illumination by use of a He-Ne laser source.",

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AU - Leger, James R

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N2 - We report a unique scanning microellipsometer using a high numerical aperture lens to provide large-angle ellipsometric illumination and high spatial resolution. This microellipsometer is equivalent to a multi-channel rotating analyzer ellipsometer obeying rotational symmetry. The symmetry is realized by using a circularly polarized incident beam, a variable circular retarder and a rotational analyzer. This rotational symmetry offers better signal-to-noise ratio compared with the other microellipsometer techniques. Scanning ellipsometric measurement of surface relief with spatial resolution of 0.5 μm is performed with a NA of 0.8 illumination by use of a He-Ne laser source.

AB - We report a unique scanning microellipsometer using a high numerical aperture lens to provide large-angle ellipsometric illumination and high spatial resolution. This microellipsometer is equivalent to a multi-channel rotating analyzer ellipsometer obeying rotational symmetry. The symmetry is realized by using a circularly polarized incident beam, a variable circular retarder and a rotational analyzer. This rotational symmetry offers better signal-to-noise ratio compared with the other microellipsometer techniques. Scanning ellipsometric measurement of surface relief with spatial resolution of 0.5 μm is performed with a NA of 0.8 illumination by use of a He-Ne laser source.

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Advanced Characterization Techniques for Optical, Semiconductor, and data Storage Components

Y2 - 9 July 2002 through 11 July 2002

ER -

Design and implementation of a rotationally symmetric microellipsometer

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