Design and implementation of a rotationally symmetric microellipsometer

Qiwen Zhan, James R Leger

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

We report a unique scanning microellipsometer using a high numerical aperture lens to provide large-angle ellipsometric illumination and high spatial resolution. This microellipsometer is equivalent to a multi-channel rotating analyzer ellipsometer obeying rotational symmetry. The symmetry is realized by using a circularly polarized incident beam, a variable circular retarder and a rotational analyzer. This rotational symmetry offers better signal-to-noise ratio compared with the other microellipsometer techniques. Scanning ellipsometric measurement of surface relief with spatial resolution of 0.5 μm is performed with a NA of 0.8 illumination by use of a He-Ne laser source.

Original languageEnglish (US)
Pages (from-to)83-89
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4779
DOIs
StatePublished - Dec 1 2002
EventAdvanced Characterization Techniques for Optical, Semiconductor, and data Storage Components - Seattle, WA, United States
Duration: Jul 9 2002Jul 11 2002

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