Design, analysis, and performance of UHF oscillators using thin-film resonator-based devices as the feedback element

Stanley G. Burns, Philip H. Thompson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Thin-film bulk-acoustic-wave resonators (TFR) and TFR-based devices are synthesized using monolithic integrated circuit techniques. AlN and ZnO are used for piezoelectric transduction. The design, analysis, and operation of a series of 1-GHz fundamental mode single-line, comb-line, and voltage-controlled oscillators using several topological variations of TFR-based filters as the feedback element are discussed. SPICE linear and nonlinear closed-loop simulations and a perturbational S-parameter measurement technique are used for design and analysis. TFR circuit representations are based on a modified Butterworth-VanDyke model with values extracted from a TOUCHSTONE optimization routine. Phase noise performance ranges from -70 dBc/Hz to -100 dBc/Hz depending on the TFR topology and oscillator function. Although these oscillators were fabricated as hybrid circuits, monolithic realizations combining the TFR and active devices on the same silicon substrate have been demonstrated.

Original languageEnglish (US)
Title of host publicationMidwest Symposium on Circuits and Systems
PublisherPubl by IEEE
Pages1005-1010
Number of pages6
StatePublished - Dec 1 1989
EventProceedings of the 32nd Midwest Symposium on Circuits and Systems Part 2 (of 2) - Champaign, IL, USA
Duration: Aug 14 1989Aug 16 1989

Other

OtherProceedings of the 32nd Midwest Symposium on Circuits and Systems Part 2 (of 2)
CityChampaign, IL, USA
Period8/14/898/16/89

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