In this paper we present the design, fabrication, and characterization of a MEMS thermal switch. Three switch designs are considered: one in which the conductive material is in the form of liquid-metal micro droplets, one in which the conductive material consists of aligned carbon nanotube arrays, and one in which solid silicon contacts are used. The ratio of thermal resistance in the on and off conditions is used to characterize performance. Based on these measurements the switch incorporating liquid-metal droplets is superior to the other two switches. The liquid-metal switch has a thermal resistance off to on ratio of 168 and can provide heating rates of 905oC/s.
|Original language||English (US)|
|Title of host publication||2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006|
|Editors||Thomas W. Kenny, Leland Spangler|
|Publisher||Transducer Research Foundation|
|Number of pages||4|
|ISBN (Electronic)||0964002469, 9780964002463|
|State||Published - 2006|
|Event||13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 - Hilton Head Island, United States|
Duration: Jun 4 2006 → Jun 8 2006
|Name||Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop|
|Conference||13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006|
|City||Hilton Head Island|
|Period||6/4/06 → 6/8/06|
Bibliographical notePublisher Copyright:
© 2006 TRF.