Engineering & Materials Science
Sol-gels
81%
Lead zirconate titanate
75%
Cantilever beams
69%
Thin films
58%
Coatings
31%
Remanence
21%
Sol-gel process
18%
Annealing
13%
Microactuators
9%
Microsensors
9%
Micromachining
8%
Film thickness
7%
Electric properties
7%
Crystalline materials
7%
Phase transitions
7%
Residual stresses
6%
Electrodes
5%
Physics & Astronomy
cantilever beams
71%
gels
48%
coatings
41%
characterization
34%
thin films
31%
baking
13%
annealing
12%
micromachining
11%
polarization
11%
residual stress
9%
phase transformations
9%
film thickness
8%
electrical properties
7%
cycles
6%
electrodes
6%
microstructure
6%
Chemical Compounds
Cantilever Beam
100%
Liquid Film
30%
Sol Gel Process
16%
Annealing
16%
Polarization
15%
Residual Stress
13%
Phase Property
13%
Electrical Property
8%
Microstructure
6%
Coating Agent
6%