Current-controlled curvature of coated micromirrors

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Abstract

Precise control of micromirror curvature is critical in many optical microsystems. Micromirrors with current-controlled curvature are demonstrated. The working principle is that resistive heating changes the temperature of the micromirrors and thermal expansion induces a controlled curvature whose magnitude is determined by coating design. For example, for wide focal-length tuning, the radius of curvature of a gold-coated mirror was tuned from 2.5 to 8.2 mm over a current-induced temperature range from 22° to 72 °C. For fine focal-length tuning, the radius of curvature of a dielectric-coated (SiO2/Y2O3 λ/4 pairs) mirror was tuned from -0.68 to -0.64 mm over a current-induced temperature range from 22 to 84 °C. These results should be readily extendable to mirror flattening or real-time adaptive shape control.

Original languageEnglish (US)
Pages (from-to)932-934
Number of pages3
JournalOptics Letters
Volume28
Issue number11
DOIs
StatePublished - Jun 1 2003

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