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Abstract
The crystallization of rare earth iron garnet films such as dysprosium iron garnet on Si substrates provides a path for integration of these complex oxides into magnetic devices. We report the growth of 50–75 nm thick dysprosium yttrium iron garnet (YDyIG) films, deposited without a seed layer then crystallized by a 750 °C rapid thermal anneal, forming a polycrystalline film with grains of several µm diameter containing radiating low-angle boundaries. The Y:Dy ratio affects the magnetization and anisotropy of YDyIG. Crystallization becomes more challenging as the garnet film thickness decreases. To crystallize thinner rare earth garnet films, tri-layer stacks consisting of a 50 nm thick gadolinium gallium garnet (GGG) seed layer, a 1.5 nm thick Pt diffusion barrier, and a 10 nm thick YDyIG film were prepared. The YDyIG/Pt/GGG tri-layers showed agglomeration of the Pt leading to a morphology consisting of a polycrystalline garnet film enriched with Dy and Fe and containing a layer of Pt nanoparticles embedded near its surface.
Original language | English (US) |
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Article number | 170043 |
Journal | Journal of Magnetism and Magnetic Materials |
Volume | 564 |
DOIs | |
State | Published - Dec 15 2022 |
Bibliographical note
Funding Information:The authors acknowledge support of SMART, one of seven centers of nCORE, a Semiconductor Research Corporation program, sponsored by the National Institute of Standards and Technology (NIST). Part of this work was carried out in the shared experimental facilities of MIT’s Center for Materials Science and Engineering, NSF DMR 1419807. JJB acknowledges support of NSF DMR 1808190. Parts of this work were carried out in the Characterization Facility, University of Minnesota, which receives partial support from the NSF through the MRSEC (DMR-2011401) and the NNCI (EECS-2025124) programs.
Funding Information:
The authors acknowledge support of SMART, one of seven centers of nCORE, a Semiconductor Research Corporation program, sponsored by the National Institute of Standards and Technology (NIST). Part of this work was carried out in the shared experimental facilities of MIT's Center for Materials Science and Engineering, NSF DMR 1419807. JJB acknowledges support of NSF DMR 1808190. Parts of this work were carried out in the Characterization Facility, University of Minnesota, which receives partial support from the NSF through the MRSEC (DMR-2011401) and the NNCI (EECS-2025124) programs.
Publisher Copyright:
© 2022 Elsevier B.V.
Keywords
- Crystallization
- Magnetic insulators
- Rare earth iron garnets
- Spintronics
MRSEC Support
- Shared
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- 2 Active
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IRG-1: Ionic Control of Materials
Leighton, C. (Leader), Birol, T. (Senior Investigator), Fernandes, R. M. (Senior Investigator), Frisbie, D. (Senior Investigator), Greven, M. (Senior Investigator), Jalan, B. (Senior Investigator), Mkhoyan, A. (Senior Investigator), Walter, J. (Senior Investigator) & Wang, X. (Senior Investigator)
9/1/20 → …
Project: Research project
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University of Minnesota Materials Research Science and Engineering Center (DMR-2011401)
Leighton, C. (PI) & Lodge, T. (CoI)
THE NATIONAL SCIENCE FOUNDATION
9/1/20 → 8/31/26
Project: Research project