Abstract
A commercial disk manufacturing sputter system with a unique design of a triple-target cathode for depositing multilayers was used to deposit ultra-thin Co/Pt and Co/Pd magnetic superlattices with ultra-thin Ta films as seed layers. The effects of Ni45Fe55 underlayer on the magnetic properties of superlattices were also studied. It was found that the soft underlayer has a significant effect on the magnetic properties of Co/Pt superlattices.
Original language | English (US) |
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Pages (from-to) | DP-4 |
Journal | Digests of the Intermag Conference |
DOIs | |
State | Published - 2000 |
Event | 2000 IEEE International Magnetics Conference-2000 IEEE INTERMAG - Toronto, Ont, Can Duration: Apr 9 2000 → Apr 13 2000 |