Abstract
The electron fluxes in low-pressure inductively coupled plasmas (ICP) were measured and studied numerically. Numerical results were obtained with a two-dimensional plasma model which resolved the ICP structure in radial and axial direction. The electron Boltzmann equation was solved in the two-term and the effective field approximation.
Original language | English (US) |
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Title of host publication | IEEE International Conference on Plasma Science |
Publisher | IEEE |
Pages | 166 |
Number of pages | 1 |
State | Published - 2000 |
Event | ICOPS 2000 - 27th IEEE International Conference on Plasma Science - New Orleans, LA, USA Duration: Jun 4 2000 → Jun 7 2000 |
Other
Other | ICOPS 2000 - 27th IEEE International Conference on Plasma Science |
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City | New Orleans, LA, USA |
Period | 6/4/00 → 6/7/00 |