Comparison of conductance and capacitance techniques for measurement of interface states in thin oxides

Keyphrases

• Capacitance-voltage 100%
• Interface States 100%
• Capacitance Technique 100%
• Conductance Method 100%
• Thin Oxides 100%
• Oxide Capacitance 100%
• Integrated Circuits 50%
• Oxides 50%
• Frequency Dependence 50%
• Gate Oxide 50%
• Gate Insulator 50%
• Equivalent Thickness 50%
• Voltage Data 50%
• High-frequency Capacitance 50%

Engineering

• Interface State 100%
• Gate Oxide 50%
• Integrated Circuit 50%