Comparative STEREO-LID (Spatioorally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films

Yejia Xu, Amir Khabbazi, Travis Day, Andrew Brown, Luke A. Emmert, Joseph J. Talghader, Ella Field, Damon Kletecka, John Bellum, Dinesh Patel, Carmen S. Menoni, Wolfgang Rudolph

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

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