Cold plasma functionalized TeraHertz BioMEMS for enzyme reaction analysis

Abdennour Abbas, Anthony Treizebre, Philippe Supiot, Nour Eddine Bourzgui, Didier Guillochon, Dominique Vercaigne-Marko, Bertrand Bocquet

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Abstract

In this paper, we describe the development, functionalization and functionality testing of a TeraHertz (THz) Bio-MicroElectroMechanical System (BioMEMS) dedicated to enzyme reaction analysis. The microdevice was fabricated by mixing clean room microfabrication with cold plasma deposition. The first is used to build the microfluidic circuits and the THz sensor, while the later serves for the polymerization of allylamine using a homemade glow discharge plasma reactor for a subsequent immobilization of enzymatic biocatalysts. Thermal stability of the deposited plasma polymer has been investigated by infrared spectroscopy. Fluorescent detection confirmed the efficiency of the immobilization and the enzyme hydrolysis into the BioMEMS microchannels. For the first time, the progression of the hydrolysis reaction over time was monitored by the THz sensor connected to a vectorial network analyzer. Preliminary results showed that sub-THz transmission measurements are able to discriminate different solid films, various aqueous media and exhibit specific transmission behavior for the enzyme hydrolysis reaction in the spectral range 0.06-0.11 THz.

Original languageEnglish (US)
Pages (from-to)154-160
Number of pages7
JournalBiosensors and Bioelectronics
Volume25
Issue number1
DOIs
StatePublished - Sep 15 2009

Keywords

  • BioMEMS
  • Biocatalysis
  • Cold plasma
  • Sub-TeraHertz spectroscopy
  • Thin films

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