The effects of CoFe thickness, Pt thickness, and number of CoFePt bilayers on the anisotropy and coercivity of [CoFePt]×n multilayer films have been studied. These parameters are varied in an attempt to deposite [CoFePt]×n multilayer films with well-defined small perpendicular magnetic anisotropies. Best results were obtained in a [CoFe 3 ÅPt 10 Å]×5 film with coercivity Hc=42 Oe, perpendicular anisotropy Hk =2200 Oe, and easy-axis remanence MrMs=1. Large Pt thickness tends to cause well-defined interfaces thus larger surface anisotropy. Large CoFe thickness and more number of bilayers tend to cause bow-tie shaped easy-axis loops and multiple domain structures.