Chemical Vapor Deposition of Thin Films of Ruthenium and Formation of an Unexpected Byproduct Using Hexafluoro-2-butynetetracarbonyl-ruthenium(0)

Yoshihide Senzaki; Wayne L. Gladfelter; Fred B. McCormick

doi:10.1021/cm00022a002

Chemical Vapor Deposition of Thin Films of Ruthenium and Formation of an Unexpected Byproduct Using Hexafluoro-2-butynetetracarbonyl-ruthenium(0)

Yoshihide Senzaki
, Wayne L. Gladfelter
, Fred B. McCormick

Chemistry (Twin Cities)

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Original language	English (US)
Pages (from-to)	747-749
Number of pages	3
Journal	Chemistry of Materials
Volume	4
Issue number	4
DOIs	https://doi.org/10.1021/cm00022a002
State	Published - Feb 1 1992

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10.1021/cm00022a002

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title = "Chemical Vapor Deposition of Thin Films of Ruthenium and Formation of an Unexpected Byproduct Using Hexafluoro-2-butynetetracarbonyl-ruthenium(0)",

author = "Yoshihide Senzaki and Gladfelter, \{Wayne L.\} and McCormick, \{Fred B.\}",

year = "1992",

month = feb,

day = "1",

doi = "10.1021/cm00022a002",

language = "English (US)",

volume = "4",

pages = "747--749",

journal = "Chemistry of Materials",

issn = "0897-4756",

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T1 - Chemical Vapor Deposition of Thin Films of Ruthenium and Formation of an Unexpected Byproduct Using Hexafluoro-2-butynetetracarbonyl-ruthenium(0)

AU - Senzaki, Yoshihide

AU - Gladfelter, Wayne L.

AU - McCormick, Fred B.

PY - 1992/2/1

Y1 - 1992/2/1

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UR - https://www.scopus.com/pages/publications/4244018764#tab=citedBy

U2 - 10.1021/cm00022a002

DO - 10.1021/cm00022a002

M3 - Article

AN - SCOPUS:4244018764

SN - 0897-4756

VL - 4

SP - 747

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JO - Chemistry of Materials

JF - Chemistry of Materials

IS - 4

ER -

Chemical Vapor Deposition of Thin Films of Ruthenium and Formation of an Unexpected Byproduct Using Hexafluoro-2-butynetetracarbonyl-ruthenium(0)

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