Chemical vapor deposition of partially oxidized graphene

Zafer Mutlu, Isaac Ruiz, Ryan J. Wu, Robert Ionescu, Sina Shahrezaei, Selcuk Temiz, Mihrimah Ozkan, K. Andre Mkhoyan, Cengiz S. Ozkan

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


Herein, we report on chemical vapor deposition (CVD) of partially oxidized graphene (POG) films on electropolished polycrystalline copper foils at relatively low temperature under near-atmospheric pressure. The structural, chemical, and electronic properties of the films are studied in detail using several spectroscopic and microscopic techniques. The content of carbon and oxygen in the films is identified by chemical mapping at near-atomic scale. Electron diffraction patterns of the films possess clear diffraction spots with a six-fold pattern that is consistent with the hexagonal lattice. The fine structure of the carbon K-edge signal in STEM-EELS spectra of the films is distinguishable from that of graphene and graphite. The presence of oxygen in the films is further supported by a clear oxygen K-edge. Raman spectroscopy and XPS results provide direct evidence for a lower degree of oxidation. The work function of the films is found to be much higher than that of graphene, using UPS measurements.

Original languageEnglish (US)
Pages (from-to)32209-32215
Number of pages7
JournalRSC Advances
Issue number51
StatePublished - 2017

Bibliographical note

Funding Information:
This work was supported by the STARnet Center C-SPIN (Center for Spintronic Materials, Interfaces and Novel Architectures), through the Semiconductor Research Corporation sponsored by the MARCO (Microelectronics Advanced Research Corporation) and the DARPA (Defense Advanced Research Projects Agency). X-ray photoelectron spectroscopy (XPS) and ultraviolet photoelectron spectroscopy (UPS) measurements were performed in the Analytical Chemistry Instrumentation Facility (ACIF) of University of California, Riverside, which receives support from NSF (National Science Foundation) through MRI (Major Research Instrumentation) program (DMR-0958796). Scanning transmission electron microscopy (STEM) and electron energy loss spectroscopy (EELS) analysis were performed in the Characterization Facility of University of Minnesota, which receives partial support from NSF through MRSEC (Materials Research Science and Engineering Centers) program (DMR-1420013).

Publisher Copyright:
© 2017 The Royal Society of Chemistry.

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