@inproceedings{4ec79d1afc854187834dde26db09fa20,
title = "Chemical vapor deposition of diamond films in an atmospheric-pressure induction plasma",
abstract = "Polycrystalline diamond films were deposited on molybdenum substrates in an atmospheric-pressure radio-frequency induction plasma. The plasma consisted of argon into which hydrogen and methane were coaxially injected. The hydrogen-methane jet impinged in stagnation-point flow upon a water-cooled substrate located downstream of the induction coils. A series of eight experiments investigated the effect of five operating parameters. Deposited films were characterized by scanning electron microscopy, Raman spectroscopy, and x-ray diffraction. Each set of parameters was found to yield a particular crystal morphology with good reproducibility. The major correlation found was for the effect of the methane-hydrogen ratio. Regardless of the value of other parameters, well-faceted crystals were always obtained when the ratio equalled 1%, whereas cauliflower or ball-like structures were always obtained with a 5% methane-hydrogen ratio.",
author = "Chiahung Li and Lau, {Y. C.} and Girshick, {S. L.}",
year = "1991",
language = "English (US)",
isbn = "0791807304",
series = "American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD",
publisher = "Publ by ASME",
pages = "15--19",
booktitle = "Heat Transfer in Thermal Plasma Processing",
note = "28th National Heat Transfer Conference ; Conference date: 28-07-1991 Through 31-07-1991",
}