Chemical vapor deposition membranes

M. Tsapatsis, G. R. Gavalas, G. Xomeritakis

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

This chapter is divided into four sections the first of which treats issues of general relevance to Chemical Vapor Deposition (CVD) of membranes, the second reviews work on dense silica membranes, the third is devoted to Y2O3-stabilized ZrO2 (YSZ) membranes, and the fourth treats CVD of Pd membranes.

Original languageEnglish (US)
Pages (from-to)397-416
Number of pages20
JournalMembrane Science and Technology
Volume6
Issue numberC
DOIs
StatePublished - Dec 1 2000

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