Abstract
This chapter is divided into four sections the first of which treats issues of general relevance to Chemical Vapor Deposition (CVD) of membranes, the second reviews work on dense silica membranes, the third is devoted to Y2O3-stabilized ZrO2 (YSZ) membranes, and the fourth treats CVD of Pd membranes.
Original language | English (US) |
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Pages (from-to) | 397-416 |
Number of pages | 20 |
Journal | Membrane Science and Technology |
Volume | 6 |
Issue number | C |
DOIs | |
State | Published - Dec 1 2000 |