Charge trapping and degradation properties of PZT thin films for MEMS

Hyeon Seag Kim, D. L. Polla, S. A. Campbell

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Fingerprint Dive into the research topics of 'Charge trapping and degradation properties of PZT thin films for MEMS'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy