Characterization of MEMS actuators VIA nanoindentation

Daniel Glumac; R. N. Rizq; William P Robbins; D. L. Polla; J. C. Nelson

Characterization of MEMS actuators VIA nanoindentation

Daniel Glumac
, R. N. Rizq
, William P Robbins
, D. L. Polla
, J. C. Nelson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Nanoindentation has been used to characterize polycrystalline silicon serpentine structures which will become the 'framework' for piezoelectric meander line microactuators. These structures are fabricated using silicon wafer surface micromachining processing techniques, and they are suspended about 1 micron above the wafer surface.

Original language	English (US)
Title of host publication	Electronic Packaging Materials Science VII
Editors	Peter Borgesen, Klavs F. Jensen, Roger A. Pollak
Publisher	Publ by Materials Research Society
Pages	419-424
Number of pages	6
ISBN (Print)	1558992227
State	Published - Jan 1 1994
Event	Proceedings of the Fall 1993 MRS Meeting - Boston, MA, USA Duration: Nov 29 1993 → Dec 3 1993

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	323
ISSN (Print)	0272-9172

Other

Other	Proceedings of the Fall 1993 MRS Meeting
City	Boston, MA, USA
Period	11/29/93 → 12/3/93

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This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

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Characterization of MEMS actuators VIA nanoindentation. / Glumac, Daniel; Rizq, R. N.; Robbins, William P et al.
Electronic Packaging Materials Science VII. ed. / Peter Borgesen; Klavs F. Jensen; Roger A. Pollak. Publ by Materials Research Society, 1994. p. 419-424 (Materials Research Society Symposium Proceedings; Vol. 323).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Glumac, D, Rizq, RN, Robbins, WP, Polla, DL & Nelson, JC 1994, Characterization of MEMS actuators VIA nanoindentation. in P Borgesen, KF Jensen & RA Pollak (eds), Electronic Packaging Materials Science VII. Materials Research Society Symposium Proceedings, vol. 323, Publ by Materials Research Society, pp. 419-424, Proceedings of the Fall 1993 MRS Meeting, Boston, MA, USA, 11/29/93.

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title = "Characterization of MEMS actuators VIA nanoindentation",

abstract = "Nanoindentation has been used to characterize polycrystalline silicon serpentine structures which will become the 'framework' for piezoelectric meander line microactuators. These structures are fabricated using silicon wafer surface micromachining processing techniques, and they are suspended about 1 micron above the wafer surface.",

author = "Daniel Glumac and Rizq, \{R. N.\} and Robbins, \{William P\} and Polla, \{D. L.\} and Nelson, \{J. C.\}",

year = "1994",

month = jan,

day = "1",

language = "English (US)",

isbn = "1558992227",

series = "Materials Research Society Symposium Proceedings",

publisher = "Publ by Materials Research Society",

pages = "419--424",

editor = "Peter Borgesen and Jensen, \{Klavs F.\} and Pollak, \{Roger A.\}",

booktitle = "Electronic Packaging Materials Science VII",

note = "Proceedings of the Fall 1993 MRS Meeting ; Conference date: 29-11-1993 Through 03-12-1993",

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AU - Glumac, Daniel

AU - Rizq, R. N.

AU - Robbins, William P

AU - Polla, D. L.

AU - Nelson, J. C.

PY - 1994/1/1

Y1 - 1994/1/1

N2 - Nanoindentation has been used to characterize polycrystalline silicon serpentine structures which will become the 'framework' for piezoelectric meander line microactuators. These structures are fabricated using silicon wafer surface micromachining processing techniques, and they are suspended about 1 micron above the wafer surface.

AB - Nanoindentation has been used to characterize polycrystalline silicon serpentine structures which will become the 'framework' for piezoelectric meander line microactuators. These structures are fabricated using silicon wafer surface micromachining processing techniques, and they are suspended about 1 micron above the wafer surface.

UR - https://www.scopus.com/pages/publications/0027927549

UR - https://www.scopus.com/pages/publications/0027927549#tab=citedBy

M3 - Conference contribution

AN - SCOPUS:0027927549

SN - 1558992227

T3 - Materials Research Society Symposium Proceedings

SP - 419

EP - 424

BT - Electronic Packaging Materials Science VII

A2 - Borgesen, Peter

A2 - Jensen, Klavs F.

A2 - Pollak, Roger A.

PB - Publ by Materials Research Society

T2 - Proceedings of the Fall 1993 MRS Meeting

Y2 - 29 November 1993 through 3 December 1993

ER -

Characterization of MEMS actuators VIA nanoindentation

Abstract

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