Characterization of MEMS actuators VIA nanoindentation

Daniel Glumac, R. N. Rizq, William P Robbins, D. L. Polla, J. C. Nelson

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Nanoindentation has been used to characterize polycrystalline silicon serpentine structures which will become the 'framework' for piezoelectric meander line microactuators. These structures are fabricated using silicon wafer surface micromachining processing techniques, and they are suspended about 1 micron above the wafer surface.

Original languageEnglish (US)
Title of host publicationElectronic Packaging Materials Science VII
EditorsPeter Borgesen, Klavs F. Jensen, Roger A. Pollak
PublisherPubl by Materials Research Society
Number of pages6
ISBN (Print)1558992227
StatePublished - Jan 1 1994
EventProceedings of the Fall 1993 MRS Meeting - Boston, MA, USA
Duration: Nov 29 1993Dec 3 1993

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


OtherProceedings of the Fall 1993 MRS Meeting
CityBoston, MA, USA


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