Characterization of d.c.jet CVD diamond films on molybdenum

D. F. Bahr; D. V. Bucci; L. S. Schadler; J. A. Last; J. Heberlein; E. Pfender; W. W. Gerberich

doi:10.1016/S0925-9635(96)00567-5

Characterization of d.c.jet CVD diamond films on molybdenum

D. F. Bahr, D. V. Bucci, L. S. Schadler, J. A. Last, J. Heberlein, E. Pfender, W. W. Gerberich

Chemical Engineering and Materials Science

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

Diamond films grown using a thermal plasma technique are characterized using a variety of techniques. The relationships between the chemistry, morphology, and mechanical properties are explored using microscopy, Raman spectroscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy. The characteristics of films grown using two different nucleation enhancement techniques are shown. Films grown using high methane concentrations at the beginning of growth produce large grained columnar films, whereas films grown on substrates which have been treated with a diamond polishing step show nanocrystalline structures. Variations in sp³ and sp² bonding and peak shifts are tracked through the thickness of the film, corresponding to variations in the methane concentration during growth. Stresses are measured using peak shifts and beam bending techniques. Adhesion is tested using indentations, and is shown to increase both as growth temperatures and surface roughness increase.

Original language	English (US)
Pages (from-to)	1462-1472
Number of pages	11
Journal	Diamond and Related Materials
Volume	5
Issue number	12
DOIs	https://doi.org/10.1016/S0925-9635(96)00567-5
State	Published - Dec 1996

Bibliographical note

Funding Information:
This research was SUlSported by the NSF under grant NSF/ECD-8721545, ERC for Plasma Aided Manufacturing, grant NFS/CDR-8721551, Center for Interfacial Engineering. Further support was provided by a URI with the University of Minnesota and Georgia Institute of Technology under grant /E-25-T46-S1/ONR. The authors wish to thank Professor M. D. Ward of the University of Minnesota for use of the AFM.

Keywords

Adhesion
Interface
Raman spectroscopy
Synthetic diamond

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@article{937b709f5c9945f298cada9773dda413,

title = "Characterization of d.c.jet CVD diamond films on molybdenum",

abstract = "Diamond films grown using a thermal plasma technique are characterized using a variety of techniques. The relationships between the chemistry, morphology, and mechanical properties are explored using microscopy, Raman spectroscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy. The characteristics of films grown using two different nucleation enhancement techniques are shown. Films grown using high methane concentrations at the beginning of growth produce large grained columnar films, whereas films grown on substrates which have been treated with a diamond polishing step show nanocrystalline structures. Variations in sp3 and sp2 bonding and peak shifts are tracked through the thickness of the film, corresponding to variations in the methane concentration during growth. Stresses are measured using peak shifts and beam bending techniques. Adhesion is tested using indentations, and is shown to increase both as growth temperatures and surface roughness increase.",

keywords = "Adhesion, Interface, Raman spectroscopy, Synthetic diamond",

author = "Bahr, {D. F.} and Bucci, {D. V.} and Schadler, {L. S.} and Last, {J. A.} and J. Heberlein and E. Pfender and Gerberich, {W. W.}",

note = "Funding Information: This research was SUlSported by the NSF under grant NSF/ECD-8721545, ERC for Plasma Aided Manufacturing, grant NFS/CDR-8721551, Center for Interfacial Engineering. Further support was provided by a URI with the University of Minnesota and Georgia Institute of Technology under grant /E-25-T46-S1/ONR. The authors wish to thank Professor M. D. Ward of the University of Minnesota for use of the AFM.",

year = "1996",

month = dec,

doi = "10.1016/S0925-9635(96)00567-5",

language = "English (US)",

volume = "5",

pages = "1462--1472",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier BV",

number = "12",

}

TY - JOUR

T1 - Characterization of d.c.jet CVD diamond films on molybdenum

AU - Bahr, D. F.

AU - Bucci, D. V.

AU - Schadler, L. S.

AU - Last, J. A.

AU - Heberlein, J.

AU - Pfender, E.

AU - Gerberich, W. W.

N1 - Funding Information: This research was SUlSported by the NSF under grant NSF/ECD-8721545, ERC for Plasma Aided Manufacturing, grant NFS/CDR-8721551, Center for Interfacial Engineering. Further support was provided by a URI with the University of Minnesota and Georgia Institute of Technology under grant /E-25-T46-S1/ONR. The authors wish to thank Professor M. D. Ward of the University of Minnesota for use of the AFM.

PY - 1996/12

Y1 - 1996/12

N2 - Diamond films grown using a thermal plasma technique are characterized using a variety of techniques. The relationships between the chemistry, morphology, and mechanical properties are explored using microscopy, Raman spectroscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy. The characteristics of films grown using two different nucleation enhancement techniques are shown. Films grown using high methane concentrations at the beginning of growth produce large grained columnar films, whereas films grown on substrates which have been treated with a diamond polishing step show nanocrystalline structures. Variations in sp3 and sp2 bonding and peak shifts are tracked through the thickness of the film, corresponding to variations in the methane concentration during growth. Stresses are measured using peak shifts and beam bending techniques. Adhesion is tested using indentations, and is shown to increase both as growth temperatures and surface roughness increase.

AB - Diamond films grown using a thermal plasma technique are characterized using a variety of techniques. The relationships between the chemistry, morphology, and mechanical properties are explored using microscopy, Raman spectroscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy. The characteristics of films grown using two different nucleation enhancement techniques are shown. Films grown using high methane concentrations at the beginning of growth produce large grained columnar films, whereas films grown on substrates which have been treated with a diamond polishing step show nanocrystalline structures. Variations in sp3 and sp2 bonding and peak shifts are tracked through the thickness of the film, corresponding to variations in the methane concentration during growth. Stresses are measured using peak shifts and beam bending techniques. Adhesion is tested using indentations, and is shown to increase both as growth temperatures and surface roughness increase.

KW - Adhesion

KW - Interface

KW - Raman spectroscopy

KW - Synthetic diamond

UR - http://www.scopus.com/inward/record.url?scp=0000956673&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0000956673&partnerID=8YFLogxK

U2 - 10.1016/S0925-9635(96)00567-5

DO - 10.1016/S0925-9635(96)00567-5

M3 - Article

AN - SCOPUS:0000956673

SN - 0925-9635

VL - 5

SP - 1462

EP - 1472

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 12

ER -

Characterization of d.c.jet CVD diamond films on molybdenum

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