Characterization of d.c.jet CVD diamond films on molybdenum

D. F. Bahr, D. V. Bucci, L. S. Schadler, J. A. Last, J. Heberlein, E. Pfender, W. W. Gerberich

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Abstract

Diamond films grown using a thermal plasma technique are characterized using a variety of techniques. The relationships between the chemistry, morphology, and mechanical properties are explored using microscopy, Raman spectroscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy. The characteristics of films grown using two different nucleation enhancement techniques are shown. Films grown using high methane concentrations at the beginning of growth produce large grained columnar films, whereas films grown on substrates which have been treated with a diamond polishing step show nanocrystalline structures. Variations in sp3 and sp2 bonding and peak shifts are tracked through the thickness of the film, corresponding to variations in the methane concentration during growth. Stresses are measured using peak shifts and beam bending techniques. Adhesion is tested using indentations, and is shown to increase both as growth temperatures and surface roughness increase.

Original languageEnglish (US)
Pages (from-to)1462-1472
Number of pages11
JournalDiamond and Related Materials
Volume5
Issue number12
DOIs
StatePublished - Dec 1996

Bibliographical note

Funding Information:
This research was SUlSported by the NSF under grant NSF/ECD-8721545, ERC for Plasma Aided Manufacturing, grant NFS/CDR-8721551, Center for Interfacial Engineering. Further support was provided by a URI with the University of Minnesota and Georgia Institute of Technology under grant /E-25-T46-S1/ONR. The authors wish to thank Professor M. D. Ward of the University of Minnesota for use of the AFM.

Keywords

  • Adhesion
  • Interface
  • Raman spectroscopy
  • Synthetic diamond

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