@inproceedings{7f4aeb3a298b4f39891730960010ad9c,
title = "Characterization of CMP slurries by filtration and other methods",
author = "Jing Wang and Ling, {Tsz Yan} and Kim, {Seong Chan} and Pui, {David Y}",
note = "Funding Information: The study was funded by the Michael J. Fox Foundation.; 21st American Filtration and Separations Society Annual Conference 2008 ; Conference date: 19-05-2008 Through 22-05-2008",
year = "2008",
language = "English (US)",
isbn = "9781605603544",
series = "American Filtration and Separations Society - 21st American Filtration and Separations Society Annual Conference 2008",
pages = "639--658",
booktitle = "21st American Filtration and Separations Society Annual Conference 2008",
}