Characterization of an RF-driven argon plasma at atmospheric pressure using broadband absorption and optical emission spectroscopy

Keyphrases

• Radio Frequency 100%
• Atmospheric Pressure 100%
• Electron Density 100%
• Broadband Absorption 100%
• Argon 100%
• Electron Temperature 100%
• Optical Emission Spectroscopy 100%
• Argon Plasma 100%
• Absolute Density 66%
• Spatially Resolved 33%
• Parallel Plates 33%
• Capacitively Coupled 33%
• Reactive Species 33%
• Visible Spectrum 33%
• Production Mechanism 33%
• Loss Mechanism 33%
• Bremsstrahlung 33%
• Gas Temperature 33%
• Electron Energy Distribution Function 33%
• Absolute Intensity 33%
• Plasma Properties 33%
• RF Glow Discharge 33%
• Atmospheric Pressure Plasma 33%
• Electronically Excited States 33%
• Optical Absorption Spectroscopy 33%
• Non-Maxwellian Electrons 33%
• Radiation Trapping 33%
• Broadband Absorption Spectroscopy 33%
• Sheath Region 33%
• Argon Glow Discharge 33%
• Metastable Atoms 33%
• Excited Species 33%
• Plate Configuration 33%

Physics

• Electron Energy 100%
• Atmospheric Pressure 100%
• Argon Plasma 100%
• Optical Emission Spectroscopy 100%
• Electron Density 75%
• Glow Discharge 50%
• Absorption Spectroscopy 50%
• Parallel Plate 25%
• Bremsstrahlung 25%
• Plasma Property 25%
• Metastable Atom 25%
• Energy Distribution 25%
• Distribution Function 25%
• Gas Temperature 25%
• Electromagnetic Absorption 25%
• Radiation Trapping 25%