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Characteristics sensitivity of FinFET to fin vertical nonuniformity

  • Jiaojiao Xu
  • , Chenyue Ma
  • , Chenfei Zhang
  • , Xiufang Zhang
  • , Wen Wu
  • , Yu Cao
  • , Wenping Wang
  • , Yun Ye
  • , Shengqi Yang
  • , Xinnan Lin
  • , Jin He

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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Engineering