Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas

  • Harold F. Winters
  • , Robert P.H. Chang
  • , C. J. Mogab
  • , John Evans
  • , John A. Thornton
  • , Hirotsugu Yasuda

Research output: Contribution to journalArticlepeer-review

27 Scopus citations
Original languageEnglish (US)
Pages (from-to)53-77
Number of pages25
JournalMaterials Science and Engineering
Volume70
Issue numberC
DOIs
StatePublished - Apr 1985
Externally publishedYes

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