Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas

Harold F. Winters; Robert P.H. Chang; C. J. Mogab; John Evans; John A. Thornton; Hirotsugu Yasuda

doi:10.1016/0025-5416(85)90268-X

Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas

Harold F. Winters, Robert P.H. Chang, C. J. Mogab, John Evans, John A. Thornton, Hirotsugu Yasuda

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	53-77
Number of pages	25
Journal	Materials Science and Engineering
Volume	70
Issue number	C
DOIs	https://doi.org/10.1016/0025-5416(85)90268-X
State	Published - Apr 1985
Externally published	Yes

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@article{a02a1103b2e549ff9203b806fcd508be,

title = "Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas",

author = "Winters, {Harold F.} and Chang, {Robert P.H.} and Mogab, {C. J.} and John Evans and Thornton, {John A.} and Hirotsugu Yasuda",

year = "1985",

month = apr,

doi = "10.1016/0025-5416(85)90268-X",

language = "English (US)",

volume = "70",

pages = "53--77",

journal = "Materials Science and Engineering",

issn = "0025-5416",

publisher = "Elsevier BV",

number = "C",

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TY - JOUR

T1 - Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas

AU - Winters, Harold F.

AU - Chang, Robert P.H.

AU - Mogab, C. J.

AU - Evans, John

AU - Thornton, John A.

AU - Yasuda, Hirotsugu

PY - 1985/4

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U2 - 10.1016/0025-5416(85)90268-X

DO - 10.1016/0025-5416(85)90268-X

M3 - Article

AN - SCOPUS:0022043043

SN - 0025-5416

VL - 70

SP - 53

EP - 77

JO - Materials Science and Engineering

JF - Materials Science and Engineering

IS - C

ER -

Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas

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