Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas

Harold F. Winters, Robert P.H. Chang, C. J. Mogab, John Evans, John A. Thornton, Hirotsugu Yasuda

Research output: Contribution to journalArticlepeer-review

25 Scopus citations
Original languageEnglish (US)
Pages (from-to)53-77
Number of pages25
JournalMaterials Science and Engineering
Volume70
Issue numberC
DOIs
StatePublished - Apr 1985

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