Chapter 12 Hydrogen Diffusion in Amorphous Silicon

Keyphrases

• Amorphous Silicon 100%
• Hydrogen Diffusion 100%
• Hydrogenated Amorphous Silicon 50%
• Film Growth 50%
• Defect Density 25%
• Silane 25%
• Defect Creation 25%
• RF Glow Discharge 25%
• Silicon Sample 25%
• Glass-like 25%
• Intrinsic Defects 25%
• Defect Removal 25%
• Conductance Change 25%
• Silicon Structure 25%

Material Science

• Amorphous Silicon 100%
• Film Growth 33%
• Diffusivity 16%
• Silane 16%
• Defect Density 16%