Channel plate multiplier as an emissive mode detector in the SEM

M. S. Hill; A. Gopinath

doi:10.1063/1.1135161

Channel plate multiplier as an emissive mode detector in the SEM

M. S. Hill, A. Gopinath

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

A channel plate multiplier was placed between the specimen and scintillator to increase the number of secondary electrons in the emissive mode of operation of the SEM. A comparison between this system and the conventional scintillator detector shows that the presence of the plate improves the signal-to-noise ratio.

Original language	English (US)
Pages (from-to)	806-808
Number of pages	3
Journal	Review of Scientific Instruments
Volume	48
Issue number	7
DOIs	https://doi.org/10.1063/1.1135161
State	Published - 1977

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title = "Channel plate multiplier as an emissive mode detector in the SEM",

abstract = "A channel plate multiplier was placed between the specimen and scintillator to increase the number of secondary electrons in the emissive mode of operation of the SEM. A comparison between this system and the conventional scintillator detector shows that the presence of the plate improves the signal-to-noise ratio.",

author = "Hill, {M. S.} and A. Gopinath",

year = "1977",

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AU - Hill, M. S.

AU - Gopinath, A.

PY - 1977

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AB - A channel plate multiplier was placed between the specimen and scintillator to increase the number of secondary electrons in the emissive mode of operation of the SEM. A comparison between this system and the conventional scintillator detector shows that the presence of the plate improves the signal-to-noise ratio.

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Channel plate multiplier as an emissive mode detector in the SEM

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