TY - JOUR
T1 - Carbon nanotube micropatterns and cantilever arrays fabricated with layer-by-layer nano self-assembly
AU - Xue, Wei
AU - Cui, Tianhong
PY - 2007/5/1
Y1 - 2007/5/1
N2 - The two-dimensional (2D) microstructures and three-dimensional (3D) cantilever arrays based on single-walled carbon nanotube (SWNT) multilayer were fabricated by combining electrostatic layer-by-layer (LbL) nano self-assembly, microlithography, and lift-off. The combinative technique provides a simple, effective, low-cost, and low-temperature fabrication method with a short processing time. The 2D SWNT micropatterns with a feature size of 5 μm were fabricated and characterized. The thickness of a (PDDA/SWNT) bi-layer was measured approximately as 76 Å. SWNTs were randomly deposited on the substrate, and they were interconnected and formed as a dense network. To investigate the potential applications of SWNTs, magnetic cantilever arrays formed with SWNTs, iron oxide (Fe2O3) nanoparticles, and polyelectrolytes were developed. A modified lift-off process was developed to provide additional protection for the cantilever arrays. Due to the outstanding mechanical properties of the SWNTs, the fabricated cantilevers are very strong and highly flexible. The cantilever arrays can be used in applications such as biosensors and microvalves.
AB - The two-dimensional (2D) microstructures and three-dimensional (3D) cantilever arrays based on single-walled carbon nanotube (SWNT) multilayer were fabricated by combining electrostatic layer-by-layer (LbL) nano self-assembly, microlithography, and lift-off. The combinative technique provides a simple, effective, low-cost, and low-temperature fabrication method with a short processing time. The 2D SWNT micropatterns with a feature size of 5 μm were fabricated and characterized. The thickness of a (PDDA/SWNT) bi-layer was measured approximately as 76 Å. SWNTs were randomly deposited on the substrate, and they were interconnected and formed as a dense network. To investigate the potential applications of SWNTs, magnetic cantilever arrays formed with SWNTs, iron oxide (Fe2O3) nanoparticles, and polyelectrolytes were developed. A modified lift-off process was developed to provide additional protection for the cantilever arrays. Due to the outstanding mechanical properties of the SWNTs, the fabricated cantilevers are very strong and highly flexible. The cantilever arrays can be used in applications such as biosensors and microvalves.
KW - Layer-by-layer (LbL) nano self-assembly
KW - Lift-off
KW - Lithography
KW - Multilayer
KW - Single-walled carbon nanotube (SWNT)
UR - http://www.scopus.com/inward/record.url?scp=34247629413&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34247629413&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2006.10.006
DO - 10.1016/j.sna.2006.10.006
M3 - Article
AN - SCOPUS:34247629413
SN - 0924-4247
VL - 136
SP - 510
EP - 517
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
IS - 2
ER -