Bubbly silicon: A new mechanism for solid phase crystallization of amorphous silicon

Curtis Anderson, Lin Cui, Uwe Kortshagen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes the rapid formation of polycrystalline silicon films through seeding with silicon nanocrystals. The incorporation of seed crystals into amorphous silicon films helps to eliminate the crystallization incubation time observed in non-seeded amorphous silicon films. Furthermore, the formation of several tens of nanometer in diameter voids is observed when cubic silicon nanocrystals with around 30 nm in size are embedded in the amorphous films. These voids move through the amorphous film with high velocity, pulling behind them a crystallized "tail." This mechanism leads to rapid formation of polycrystalline films.

Original languageEnglish (US)
Title of host publicationProceedings of the ASME 3rd International Conference on Energy Sustainability 2009, ES2009
Pages977-978
Number of pages2
DOIs
StatePublished - Dec 1 2009
EventASME 3rd International Conference on Energy Sustainability, ES2009 - San Francisco, CA, United States
Duration: Jul 19 2009Jul 23 2009

Publication series

NameProceedings of the ASME 3rd International Conference on Energy Sustainability 2009, ES2009
Volume1

Other

OtherASME 3rd International Conference on Energy Sustainability, ES2009
Country/TerritoryUnited States
CitySan Francisco, CA
Period7/19/097/23/09

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