Bonding organic molecules to hydrogen-terminated silicon wafers

L. A. Zazzera, J. F. Evans, M. Deruelle, M. Tirrell, C. R. Kessel, P. Mckeown

Research output: Contribution to journalArticlepeer-review

47 Scopus citations

Abstract

A platinum catalyzed hydrosilation reaction between 3,4,-dichlorobutene and the hydrogen-terminated (100) Si surface was used to bond dichlorobutane molecules to silicon wafers treated with dilute HF acid. In situ infrared, x-ray photoelectron spectroscopy, and time-of-flight secondary ion mass spectroscopy were used to characterize the modified silicon surfaces. The results from this investigation indicate that 3,4,-dichlorobutene reacts with surfaces silicon hydride groups to yield 3,4,-dichlorobutane, which bonds to the surface via Si-C bonds. This work demonstrates that organic molecules can be selectively patterned onto hydrogen-terminated silicon wafers using standard microelectronic patterning methods.

Original languageEnglish (US)
Pages (from-to)2184-2188
Number of pages5
JournalJournal of the Electrochemical Society
Volume144
Issue number6
DOIs
StatePublished - Jun 1997

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