Block-copolymer healing of simple defects in a chemoepitaxial template

Paul N Patrone, Gregg M. Gallatin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Using the Leibler-Ohta-Kawasaki (LOK) phase-field model of block copolymers (BCPs), we characterize how a chemoepitaxial template with parallel lines of arbitrary width affects the BCP microdomain shape. We apply boundary conditions that account for the interactions of the polymers with the templated substrate and a neutral top-coat. We derive formulas for the monomer density and the microdomain interface profile of periodic, lamellar BCP melts whose template lines are wider or narrower than the bulk microdomain width. For such systems, our analysis (i) shows that mass conservation causes the microdomain interfaces to oscillate about their bulk positions and (ii) determines the length scale λ over which these oscillations decay away from the substrate.

Original languageEnglish (US)
Title of host publicationAlternative Lithographic Technologies V
DOIs
StatePublished - Jun 5 2013
EventAlternative Lithographic Technologies V - San Jose, CA, United States
Duration: Feb 25 2013Feb 28 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8680
ISSN (Print)0277-786X

Other

OtherAlternative Lithographic Technologies V
CountryUnited States
CitySan Jose, CA
Period2/25/132/28/13

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