Atomically precise synthesis of oxides with hybrid molecular beam epitaxy

Investigating materials at the atomic scale has unlocked possibilities for applications ranging from microelectronics to quantum technologies. Central to these advances is the innovation in synthesis techniques that can support precise control over material properties at the atomic level. This review article examines advances in synthesis approaches for oxides, with an emphasis on molecular beam epitaxy (MBE). We highlight state-of-the-art MBE methodologies, including metalorganic hybrid MBE, suboxide MBE, and thermal laser epitaxy, offering an overview of atomically precise quantum material synthesis. We also provide a guiding framework for future innovations by bridging the gap between synthesis science and source chemistry.