Keyphrases
A-Si
100%
Atomic-scale Analysis
100%
Radical Precursors
100%
Deposited Film
75%
Molecular Dynamics Simulation
50%
Dissociation
50%
Film Growth
50%
Surface Hydride
50%
Dangling Bonds
50%
Gas Phase
25%
Surface Reaction
25%
Columnar Structure
25%
Impingement
25%
Adsorption
25%
Structural Characterization
25%
Chemical Characterization
25%
Surface Roughness
25%
Surface Morphology
25%
Eley-Rideal Mechanism
25%
H-abstraction
25%
Surface Composition
25%
Reaction Probability
25%
Desorption
25%
Surface Interaction
25%
Atomic Hydrogen
25%
Surface Reactivity
25%
Si(111)
25%
Film Structure
25%
Subsurface Layer
25%
Bond Density
25%
Surface Adsorption
25%
Hydrogenated Amorphous Silicon Films
25%
Structural Quality
25%
Structured Surface
25%
Void Structure
25%
Morphology Surface
25%
Roughness Surface
25%
Surface Dangling Bonds
25%
Interaction Trajectory
25%
Minority Species
25%
Interstitial Hydrogen
25%
Rough Surface Morphology
25%
Monohydrides
25%
Engineering
Deposited Film
100%
Scale Analysis
100%
Thin Films
100%
Surface Morphology
66%
Dangling Bond
66%
Subsurface
33%
Gas-Phase
33%
Good Agreement
33%
Experimental Measurement
33%
Si-Si Bond
33%
Dangling Bond Density
33%
Hydrogenated Amorphous Silicon
33%
Structure Surface
33%
Columnar Structure
33%
Atomic Hydrogen
33%
Chemical Characterization
33%
Producing Device
33%
Eley-Rideal Mechanism
33%
Material Science
Surface (Surface Science)
100%
Thin Films
100%
Film
85%
Hydride
28%
Film Growth
28%
Surface Morphology
28%
Amorphous Silicon
14%
Density
14%
Desorption
14%
Rough Surface
14%
Surface Reaction
14%
Surface Structure
14%
Surface Roughness
14%