Applications of AlN thin-film resonator topologies as antennas and sensors

Robert J. Weber; Stanley G. Burns; Charles F. Campbell; Ron O'Toole

Applications of AlN thin-film resonator topologies as antennas and sensors

Robert J. Weber
, Stanley G. Burns
, Charles F. Campbell
, Ron O'Toole

Electrical Engineering

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

The authors report on two novel microwave applications of thin-film resonator (TFR) technology. The first application is the use of an array of TFRs as an on-wafer, phased-array antenna; the second is a gas and chemical mass sensor with nanogram sensitivity.

Original language	English (US)
Pages (from-to)	161-164
Number of pages	4
Journal	IEEE MTT-S International Microwave Symposium Digest
Volume	1
State	Published - Jun 1992
Event	1992 IEEE MTT-S International Microwave Symposium Digest Part 2 (of 3) - Albuquerque, NM, USA Duration: Jun 1 1992 → Jun 5 1992

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@article{44b26853fbbe46d99ffab3a3200192e5,

title = "Applications of AlN thin-film resonator topologies as antennas and sensors",

abstract = "The authors report on two novel microwave applications of thin-film resonator (TFR) technology. The first application is the use of an array of TFRs as an on-wafer, phased-array antenna; the second is a gas and chemical mass sensor with nanogram sensitivity.",

author = "Weber, \{Robert J.\} and Burns, \{Stanley G.\} and Campbell, \{Charles F.\} and Ron O'Toole",

year = "1992",

month = jun,

language = "English (US)",

volume = "1",

pages = "161--164",

journal = "IEEE MTT-S International Microwave Symposium Digest",

issn = "0149-645X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "1992 IEEE MTT-S International Microwave Symposium Digest Part 2 (of 3) ; Conference date: 01-06-1992 Through 05-06-1992",

}

TY - JOUR

T1 - Applications of AlN thin-film resonator topologies as antennas and sensors

AU - Weber, Robert J.

AU - Burns, Stanley G.

AU - Campbell, Charles F.

AU - O'Toole, Ron

PY - 1992/6

Y1 - 1992/6

N2 - The authors report on two novel microwave applications of thin-film resonator (TFR) technology. The first application is the use of an array of TFRs as an on-wafer, phased-array antenna; the second is a gas and chemical mass sensor with nanogram sensitivity.

AB - The authors report on two novel microwave applications of thin-film resonator (TFR) technology. The first application is the use of an array of TFRs as an on-wafer, phased-array antenna; the second is a gas and chemical mass sensor with nanogram sensitivity.

UR - https://www.scopus.com/pages/publications/0026882538

UR - https://www.scopus.com/pages/publications/0026882538#tab=citedBy

M3 - Conference article

AN - SCOPUS:0026882538

SN - 0149-645X

VL - 1

SP - 161

EP - 164

JO - IEEE MTT-S International Microwave Symposium Digest

JF - IEEE MTT-S International Microwave Symposium Digest

T2 - 1992 IEEE MTT-S International Microwave Symposium Digest Part 2 (of 3)

Y2 - 1 June 1992 through 5 June 1992

ER -

Applications of AlN thin-film resonator topologies as antennas and sensors

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